Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Additive manufacturing, also known as 3D printing, has had a major impact on the contemporary design and production process. First developed in 1988 with the aim of allowing for rapid prototyping, ...

Modern manufacturing processes and technologies form the backbone of advanced industrial production, enabling the precise fabrication of components across aerospace, automotive, electronics, and ...